Assumption University
Bangkok, Thailand
August 1999
Quality
Built-in Computer-aided Process Control for Semi-conductor Industry
by
Pichit Saengpongpaew
A doctoral dissertation submitted in partial
fulfillment of the requirements for the degree of Doctor of Philosophy
in Computer and Engineering Management.
- Examination Committee :
- Prof. Dr. Srisakdi Charmonman
- Assoc.Prof. Somchai Tayarnyong
- Assist Rrof. Dr. Boonmark Sirinaovakul
- Air Marshal Dr.Chulit Meesajjee
- Asst.Prof.Dr. Vichit Avatchanakorn
- Dr.Chamnong Jungthirapanich
- Dr. Prapon Phasukyud
- Dr. Tatchapol Poshyanonda
- Dr. Maitree Wasuntiwongse
- Name :
- Pichit Saengpongpaew
- Nationality :
- Thai
- Previous Degree :
- Master of Sciences in CEM
- Assumption University, Thailand
- Bachelor of Engineering (Industrial engineer)
- Khon Khan University, Thailand
Approval Page
RESEARCH TITLE : Quality Built-in Computer-aided Process Control for Semi-conductor Industry
CANDIDATE NAME : Pichit Saengpongpaew
ADVISOR NAME : Asst. Prof. Dr.Boonmark Sirinaovakul
ACADEMIC YEAR : 1999
The Graduate School of Assumption University had
approved this dissertation as a partial fulfillment of the requirement
for the degree of Doctor of Philosophy in Computer and Engineering Management
- Abstract
- Quality Built-in Computer-aided Process Control
is very important for the Semiconductor industry in order to stay
the competitive advantage. It is useful for industrial organizations
and technological strategists not only to reach the practicality of
six-sigma process control but also to ensure that organizational goal
of improving quality and productivity through CAPS system can be achieved
effectively.
- The proposed methodology for Computer-aided
Process Comtrol (CAPC) system was designed and implemented to center
the process at the target or nominal value of the characteristic.
With regard to the effectiveness of the proposed electronic control
chart, it is examined by three mechanisms in order for dealing with
process variability namely: Process data acquisitions, Process variation
diagnostic & solving and process consistency & improvement. The raw
data were collected from seven Integrated Circuit operations through
questionnaires supporting the framework. Results of CAPS show the
accuracy in process trend and process capability index. Furthermore,
decision making model was created as a strategy in order to manage
quality. Finally, we proposed an approximate predictive equation based
on a linear regression technique. Engineers and system designers can
use this prodictive model to estimate the performance of the system
by giving a combination of levels to each factor.
- Therefore CAPC, the innovated system permits us not
only to identify the process variation problems, which impact to the
quality consistency of product by the six-sigma process design, but
also to provide the plant-specific solutions to these problems.
- Acknowledgements
- The author greatly appreciates the comtribution
of numerous individuals who help to complete this dissertation. Firstly,
the author wishes to thank you pretty much for Asst.Prof.Dr. Boonmark
Sirinaovakul the advisor of the dissertation working for his continuing
advise, assistance and correction through this dissertation.
- Next, the author wishes to thank Prof.Dr. Srisakdi
Charmonman for his valuable support and advise throughout the doctoral
program.
- The author wishes to thank Asst.Prof.Dr. Vichit
Avatchanakorn for his recommendations and encouragement.
- The author wishes to thanks Assoc.Prof. Somchai
Thayarnyong for his support in core value in order to prepare the
perfect of this dissertation.
- Finally, the attempts of their assistance are highly
worthwhile to make this dissertation to be successful in well-known
research topic on the computer and engineering management area.
- Table of Contents
- Abstract
- Acknowledgements
- List of Figures
- list of Tables
- Chapter 1 : Introduction
-
- 1.1 Background
- 1.2 Problems Definition
- 1.3 Ojectives of the Study
- 1.4 Scope of the Study
- 1.5 A Glossary of Term Used in This Study
- Chapter 2 : Literature Review
- Chapter 3 : Conceptual Design
-
- 3.1 The Types and Causes of Variation
- 3.2 Comcept of the Control Chart
- 3.3 The Mechanism for Dealing wiht Process Variability
- Chapter 4 : Design Procedure
-
- 4.1 System Configuration
- 4.2 Key Features and Benefits
- Chapter 5 : System Evaluation
-
- 5.1 Methodology
- 5.2 Analysis of Result
- 5.3 Human Aspects of Organizing
- Chapter 6 : Decision Making Model
-
- 6.1 Regression Model
- 6.2 Validation of Model
- 6.3 Decision-making
- Chapter 7 : Discussion and Conclusion
-
- 7.1 Discussion
- 7.2 Conclusion
- Appendix A : The questionnaire Form
- Appendix B : The Process Capability Study
- Appendix C : An Attribute Process Control Chart
- Appendix D : A Variable Process Contral Chart
- Bibliography
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